MTI Mini CVD Tube Furnace

GSL-1700X-F3LV series tube furnace is a CE certified alumina tube furnace with mechanical vacuum pump and two channels gas flowing system, which can heat sample to 1700°C and achieve vacuum degree up to 5×10-2 torr and mix 2 type of gases for CVD or diffusion


Tube Furnace Structure Double layer steel casing with air cooling. Two cooling fan inside to keep temperature of outside case < 55°C.
High purity fibrous alumina insulation for Max, energy saving.
Heating Element 1800 grade MoSi2 ( 8 pcs )
Max. Heating Temp. 1700°C
Max. Heating Rate 5°C/min
Max. Cooling Rate 5°C/min
Heating Zone Length 455mm (18″)
Constant Temp. Zone 150(+/-1C)
Temp. Controller One precision temperature controllers.
PID precision control by SCR
30 segments programmable for any temperature profile.
Built in protection for overheated and broken thermal couple.
Temp. Accuracy +/-1°C
Tube Size and Materials 99.8% high purity Al2O3 ceramic tube
ID: 72mm x OD: 80 mm x 1000 mm length.

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